Simultaneous existence of stochastic and ohmic heating in capacitive discharges

Abstract

A one-dimensional particle-in-cell/Monte Carlo (PIC/MCC) model of low-pressure capacitive discharges with a large discharge gap is presented in the paper. The results from the model are for the dependence of the plasma parameters on the pressure and on the discharge radius. The study is directed to the heating mechanisms in the discharge. It is shown that the ohmic (Joule) heating in the plasma bulk could act simultaneously with the stochastic heating in the region of the plasma–sheath boundary. In confirmation of the results of the model, experimental results showing qualitatively the same behaviour are presented.