Validation of inductively coupled plasma simulation model by laser Thomson scattering experiment

Abstract

To comprehensively study the physical properties of inductively coupled plasma (ICP), a finite element method (FEM) simulation model of ICP is developed using the well-established COMSOL software. To benchmark the validation of the FEM model, two key physical parameters, the electron density and the electron temperature of the ICP plasma, are precisely measured by the state-of-the-art laser Thomson scattering diagnostic approach. For low-pressure plasma such as ICP, the local pressure in the generator tube is difficult to measure directly. The local gas pressure in the ICP tube has been calibrated by comparing the experimental and simulation results of the maximum electron density. And on this basis, the electron density and electron temperature of ICP under the same gas pressure and absorbed power have been compared by experiments and simulations. The good agreement between the experimental and simulation data of these two key physical parameters fully verifies the validity of the ICP FEM simulation model. The experimental verification of the ICP FEM simulation model lays a foundation for further study of the distribution of various physical quantities and their variation with pressure and absorption power, which is beneficial for improving the level of ICP-related processes.