Abstract
A model is presented for the ion distribution function in a plasma at a solid target with a magnetic field
$\boldsymbol {B}$
inclined at a small angle,
$\alpha \ll 1$
(in radians), to the target. Adiabatic electrons are assumed, requiring
$\alpha \gg \sqrt {Zm_{e}/m_{i}}$
, where
$m_{e}$
and
$m_{i}$
are the electron and ion mass, respectively, and
$Z$
is the charge state of the ion. An electric field
$\boldsymbol {E}$
is present to repel electrons, and so the characteristic size of the electrostatic potential
$\phi$
is set by the electron temperature
$T_{e}$
,
$e\phi \sim T_{e}$
, where
$e$
is the proton charge. An asymptotic scale separation between the Debye length
$\lambda _{D} = \sqrt {\epsilon _0 T_{{e}} / e^{2} n_{{e}} }$
, the ion sound gyro-radius
$\rho _{s} = \sqrt { m_{i} ( ZT_{e} + T_{i} ) } / (ZeB)$
and the size of the collisional region
$d_{c} = \alpha \lambda _{\textrm {mfp}}$
is assumed,
$\lambda _{D} \ll \rho _{s} \ll d_{c}$
. Here
$\epsilon _0$
is the permittivity of free space,
$n_{e}$
is the electron density,
$T_{i}$
is the ion temperature,
$B= |\boldsymbol {B}|$
and
$\lambda _{\textrm {mfp}}$
is the collisional mean free path of an ion. The form of the ion distribution function is assumed at distances
$x$
from the wall such that
$\rho _{s} \ll x \ll d_{c}$
, that is, collisions are not treated. A self-consistent solution of the electrostatic potential for
$x \sim \rho _{s}$
is required to solve for the quasi-periodic ion trajectories and for the ion distribution function at the target. The large gyro-orbit model presented here allows to bypass the numerical solution of
$\phi (x)$
and results in an analytical expression for the ion distribution function at the target. It assumes that
$\tau =T_{i}/(ZT_{e})\gg 1$
, and ignores the electric force on the quasi-periodic ion trajectory until close to the target. For
$\tau \gtrsim 1$
, the model provides an extremely fast approximation to energy–angle distributions of ions at the target. These can be used to make sputtering predictions.
Publisher
Cambridge University Press (CUP)
Cited by
2 articles.
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