Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures

Author:

Barte E. F.,Lokasani R.,Proska J.,Maresova L.,Kos D.,Maguire O.,Joseph G.,Sheil J.,O'Reilly F.,McCormack T.,Sokell E.,O'Sullivan G.,Limpouch J.,Dunne P.

Abstract

AbstractThe effects of shape and thickness of a tin surface layer and of the energy of a 170 ps neodymium:yttrium-aluminum-garnet laser pulse on the conversion efficiency (CE) into extreme ultraviolet emission in the 13.5 nm region is investigated. Whereas a CE of up to 1.16% into the 2% reflection band of multilayer Mo/Si optics was measured for a bulk Sn target at a laser energy of 25 mJ, significant CE enhancement up to 1.49% is demonstrated for a 200-nm-thick Sn layer on a microstructured porous alumina substrate.

Publisher

Hindawi Limited

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics

Reference25 articles.

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