Author:
BUSSOLI MARCO,BATANI DIMITRI,DESAI TARA,CANOVA FEDERICO,MILANI MARZIALE,TRTICA MILAN,GAKOVIC BILJANA,KROUSKY EDOUARD
Abstract
We propose the use of Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) devices for the analysis of ablation results. Ablated samples have been obtained by irradiating an Al planar target with an optically smoothed iodine laser working at 0.44 μm. The interpretation of FIB images shows the high potentiality of the technique.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics
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