Author:
Lu Z.W.,Liu X.Y.,Wang X.,Ba D.X.,Jiang Z.H.,Du P.Y.,Zhu C.Y.
Abstract
AbstractIn this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Cited by
5 articles.
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