Choosing the Right Accelerating Voltage for SEM (An Introduction for Beginners)

Author:

Dusevich V.M.,Purk J.H.,Eick J.D.

Abstract

Historically, most SEM operators used accelerating voltages that were fairly high, quite often in the range of 15–20 kV. Now progress in electron optics has made low-voltage observations a routine mode of SEM operation. The greatly improved range of utilized accelerating voltages provides the SEM operator with additional flexibility and with additional responsibilities for choosing the right SEM settings for image acquisition.

Publisher

Cambridge University Press (CUP)

Subject

General Medicine

Reference3 articles.

1. [3] This paper was supported in part by USPHS Grant K23-DE016324.

2. [2] The authors greatly acknowledge Drs. S. Honigberg and D. Guo for permission to use their specimens in preparation of this paper.

3. [1] All micrographs presented in this paper were obtained with Field Emission SEM XL30 (FEI, Hillsboro, OR).

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