Author:
Venables J.A.,Janssen A.P.
Abstract
In the last decade, Auger Electron Spectroscopy (AES) has become a
standard tool of surface physics and chemistry. Under electron bombardment,
atoms emit Auger electrons having characteristic energies, so that the
atomic species present can be identified after the manner of X-ray
spectroscopy. AES is complementary to X-ray spectroscopy in several ways.
First, it is much more surface sensitive, since the inelastic mean free path
for Auger electrons, whose energies are typically in the range 50 - 1500 eV,
is ~ lnm. Second, atomic relaxation following the primary ionization results
in either an X-ray or an Auger electron. Auger emission is dominant for low
energy processes, so that AES is relatively more favourable for light
element analysis than X-ray spectroscopy.
Publisher
Cambridge University Press (CUP)
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