X-ray probe microanalyses and scanning x-ray microscopies

Abstract

The focusing and scanning of X-ray photon beam is a difficult operation. Thus in order to obtain data concerning the elemental composition of a specimen, the analytical techniques based on incident X-ray photons have generally a poor degree of lateral localization. The aim of the present paper is to show how it is possible to develop microanalytical techniques based on X-ray excitation of inner shell electrons like X-ray photoelectron spectroscopy (XPS or ESCA)and X-ray induced Auger electron spectroscopy (XAES)for surface analysis; X-ray fluorescence spectroscopy (XRF)for bulk analysis. The same experimental arrangement is also applied to develop the corresponding scanning microscopies: Scanning X-ray Photoelectron Microscopy(SXPM), Scanning X-ray induced Auger Microscopy(SXAM)and Scanning X-ray radiography(SXR). The experimental set-up and obtained results will be presented; further improvements and comparisons with other technical solutions will be discussed.