Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

Abstract

AbstractA one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable α mode in a range of 100 MHz of driven frequency.