Author:
Jensen Kimberly A.,Lusk Craig P.,Howell Larry L.
Abstract
This paper introduces a three degree of freedom XYZ Micromanipulator (XYZM) that is fabricated in the $x$-$y$ plane and positions components in the $x$, $y$, and $z$ directions using three independent linear inputs. The mechanism positions components on a platform using three legs, each composed of a slider mechanism and a parallelogram mechanism.Three versions of the XYZM were fabricated and tested using surface micromachining processes: the rigid-body, offset, and compliant XYZM. Slider displacements of 45 micrometers result in a predicted out-of-plane displacement of 188 micrometers for the rigid-body XYZM, 205 micrometers for the offset XYZM, and 262 micrometers for the compliant XYZM.
Publisher
Cambridge University Press (CUP)
Subject
Computer Science Applications,General Mathematics,Software,Control and Systems Engineering
Cited by
39 articles.
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