Author:
De Angelis Giorgio,Lucibello Andrea,Proietti Emanuela,Marcelli Romolo,Bartolucci Giancarlo,Casini Federico,Farinelli Paola,Mannocchi Giovanni,Di Nardo Sergio,Pochesci Daniele,Margesin Benno,Giacomozzi Flavio,Vendier Olivier,Kim Taeyoung,Vietzorreck Larissa
Abstract
Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks.
Publisher
Cambridge University Press (CUP)
Subject
Electrical and Electronic Engineering
Reference20 articles.
1. [17] Beneš V. E. : Mathematical Theory of Connecting Networks and Telephone Traffic, Academic Press, 1965, New York and London.
2. Single-pole-four-throw switch using high-aspect-ratio lateral switches
3. [1] Kang S. ; Kim H.C. ; Chun K. : Single pole four throw RF MEMS switch with double stop comb drive, In IEEE 21st Int. Conf. on Micro Electro Mechanical Systems, 2008. MEMS 2008, 13–17 January 2008, 1036–1039.
4. Surface-micromachined RF MEMs switches on GaAs substrates
5. [9] Cho I. ; Song T. ; Baek S. : A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces, In Proc. 34th EuMC 2004, Amsterdam, 11–15 October 2004, vol. 3, 1445–1448.
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献