RF MEMS ohmic switches for matrix configurations

Author:

De Angelis Giorgio,Lucibello Andrea,Proietti Emanuela,Marcelli Romolo,Bartolucci Giancarlo,Casini Federico,Farinelli Paola,Mannocchi Giovanni,Di Nardo Sergio,Pochesci Daniele,Margesin Benno,Giacomozzi Flavio,Vendier Olivier,Kim Taeyoung,Vietzorreck Larissa

Abstract

Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks.

Publisher

Cambridge University Press (CUP)

Subject

Electrical and Electronic Engineering

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