New Approaches for Energy Filtered Imaging and EELS Analysis

Abstract

Electron energy-loss spectroscopy imaging is now becoming an established and indispensable tool in high-resolution materials characterization. Whether the imaging approach is based on post column filters attached to a conventional transmission electron microscope (TEM) or on parallel spectrometers on a scanning (field emission) TEM, energy filtered (EF) microscopy is having a significant impact in materials science (e.g. Ref. 1). Elemental mapping, however, is not the only imaging tool accessible with EF microscopy. EELS images and spectra are often only part of the data that is obtained when samples are characterized in an analytical TEM. Complementary information is also obtained from EDS spectra which are often analyzed independently from the EELS data and from EELS near edge structures. When the EELS fine structure is altered due to changes in chemical state of the probed atoms, additional information is accessible and can potentially be used in novel methods of image acquisition.