Author:
Bals Sara,Tirry Wim,Geurts Remco,Yang Zhiqing,Schryvers Dominique
Abstract
Focused ion beam specimen preparation has been used for NiTi samples
and SrTiO3/SrRuO3 multilayers with prevention of
surface amorphization and Ga implantation by a 2-kV cleaning procedure.
Transmission electron microscopy techniques show that the samples are of
high quality with a controlled thickness over large scales. Furthermore,
preferential thinning effects in multicompounds are avoided, which is
important when analytical transmission electron microscopy measurements
need to be interpreted in a quantitative manner. The results are compared
to similar measurements acquired for samples obtained using conventional
preparation techniques such as electropolishing for alloys and ion milling
for oxides.
Publisher
Cambridge University Press (CUP)
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