AES Investigation of Inhomogenous Metal-Insulator Samples-Reference-Cited by-同舟云学术

AES Investigation of Inhomogenous Metal-Insulator Samples

Published:2005-11-15 Issue:6 Volume:11 Page:567-571
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Dobos Gábor,Vida György,Tóth Zoltán,Josepovits Katalin

Abstract

In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

Reference7 articles.

1. Seiler, H. (1983).Secondary electron emission in the scanning electronmicroscope.J Appl Phys 54,R1–R18.

2. Seah, M.P. & Spencer, J.J. (2000).AES of bulk insulators—Control and characterisation of thesurface charge.J Electron Spectrosc 109,291–308.

3. Wannaparhun, S. , Seal, S. , Scammon, K. , Desai, V. , & Rahman, Z. (2001).Physics of insulating specimen preparation for non-charging Augerelectron spectroscopy.J Phys D: Appl Phys 34,3319–3326.

4. Benka, O. & Steinbatz, M. (2003).Oxidation of aluminium studied by secondary electronemission.Surf Sci 525,207–214.

5. Grunder, M. & Halbritter, J. (1980).XPS and AES studies on oxide growth and oxide coatings onniobium.J Appl Phys 51,397–405.

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Chemistry of materials science phenomena in high-intensity discharge light sources;Pure and Applied Chemistry;2007-01-01