Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM-Reference-Cited by-同舟云学术

Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

Published:2014-06-24 Issue:5 Volume:20 Page:1565-1575
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Zoukel Abdelhalim,Khouchaf Lahcen,Di Martino Jean,Ruch David

Abstract

AbstractA procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (DINT) has been achieved.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

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