Quantitative Position-AveragedK-,L-, andM-Shell Core-Loss Scattering in STEM

Abstract

AbstractWe present a quantitative comparison between experimental position-averaged core-loss scattering fromK-,L-, andM-shells of various elements and simulations based on a single-particle description of the core-loss process. To facilitate a direct comparison free of adjustable or compensating parameters, we compare absolute scattering cross-sections for zone-axis-aligned crystals whose thicknesses have been measured independently. The results show that the single-particle model accurately predicts the absolute scattering intensity fromK-shells, andL-shells in some cases, but achieves only semi-quantitative agreement forM-shells.