Author:
Fritzsch Carsten,Giacomozzi Flavio,Karabey Onur Hamza,Bildik Saygin,Colpo Sabrina,Jakoby Rolf
Abstract
In this paper, we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystal as a tunable dielectric layer underneath gold bridges are used to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 92°, a figure of merit (FoM) of 42°/dB and an input matching of −19 dB at 76 GHz.The tuning speed of the phase shifter is measured at different temperatures between 10 and 50°C. The realized phase shifter can be used in combination with MEMS switches in order to build a 360° tunable reflection phase shifter.
Publisher
Cambridge University Press (CUP)
Subject
Electrical and Electronic Engineering
Reference21 articles.
1. [15] Fritzsch C. : Continuously tunable W-band phase shifter based on liquid crystals and MEMS technology, in Proc. of the 41st European Microwave Conf., no. October, 2011, 1083–1086.
2. Fundamentals of Liquid Crystal Devices
3. RF MEMS
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