1. [4] Hoerni, J. A. , “Method of manufacturing semiconductor devices,” US Patent 3025589A, 1962.
2. [9] Athena and Victory Process are TCAD tools developed by Silvaco Inc. that provide a variety of 2D and 3D modeling capabilities.
3. [12] “International Technology Roadmap for Semiconductors,” (ITRS). See http://www.itrs2.net/itrs-reports.html.
4. The path to the conception of the junction transistor