Multiple-Instrument Analyses of Single Micron-Size Particles

Abstract

Physical, chemical, and isotopic analyses of individual radioactive and other particles in the micron-size range, key tools in environmental research and in nuclear forensics, require the ability to precisely relocate particles of interest (POIs) in the secondary ion mass spectrometer (SIMS) or in another instrument, after having been located, identified, and characterized in the scanning electron microscope (SEM). This article describes the implementation, testing, and evaluation of the triangulation POIs re-location method, based on microscopic reference marks imprinted on or attached to the sample holder, serving as an inherent coordinate system. In SEM-to-SEM and SEM-to-SIMS experiments re-location precision better than 10 μm and 20 μm, respectively, is readily attainable for instruments using standard specimen stages. The method is fast, easy to apply, and facilitates repeated analyses of individual particles in different instruments and laboratories.