Simultaneous Correction of Spherical and Chromatic Aberrations with an Electron Mirror: An Electron Optical Achromat

Abstract

Abstract: All lenses, whether for light or for electrons, have aberrations that limit their performance. In light optics the invention of the achromat over 200 years ago solved the problem of correcting spherical and chromatic aberrations; however, correcting aberrations of electron lenses remains a challenge. Spherical and chromatic aberrations constitute a fundamental barrier to improving resolution and reducing probe size in various types of electron-optical instruments. Recently, efforts have intensified to reduce probe size in microanalysis and lithography, and to improve resolution in the new emission microscopes being built for synchrotron light sources. The experiments described in this report show how an electron mirror can achieve simultaneous correction of spherical and chromatic aberrations.