3D Elemental Mapping Using a Dedicated FIB/STEM System-Reference-Cited by-同舟云学术

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3D Elemental Mapping Using a Dedicated FIB/STEM System

Published:2004-08 Issue:S02 Volume:10 Page:1030-1031
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Yaguchi Toshie,Konno Mitsuru,Kamino Takeo,Hashimoto Takahito,Ohnishi Tsuyoshi,Watanabe Masashi

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multivariate statistical analysis as a tool for the segmentation of 3D spectral data;Micron;2013-09

2. Electron Tomography;Handbook of Nanoscopy;2012-05-23

3. Electron tomography and holography in materials science;Nature Materials;2009-04

4. Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system;Ultramicroscopy;2008-11

5. FIB Lift-Out and Milling of Cylindrical Specimens for Electron Tomography (or Atom Probe Field Ion Microscopy);Microscopy Today;2004-11

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