Author:
Nellist P.D.,Cosgriff E.C.,Behan G.,Kirkland A.I.
Abstract
Aberration correction leads to reduced focal depth of field in the electron microscope. This reduced depth of field can be exploited to probe specific depths within a sample, a process known as optical sectioning. An electron microscope fitted with aberration correctors for both the pre- and postspecimen optics can be used in a confocal mode that provides improved depth resolution and selectivity over optical sectioning in the scanning transmission electron microscope (STEM). In this article we survey the coherent and incoherent imaging modes that are likely to be used in scanning confocal electron microscopy (SCEM) and provide simple expressions to describe the images that result. Calculations compare the depth response of SCEM to optical sectioning in the STEM. The depth resolution in a crystalline matrix is also explored by performing a Bloch wave calculation for the SCEM geometry in which the pre- and postspecimen optics are defocused away from their confocal conditions.
Publisher
Cambridge University Press (CUP)
Reference18 articles.
1. Cosgriff, E.C. & Nellist, P.D. (2007).A Bloch wave analysis of optical sectioning in aberration-corrected STEM.Ultramicroscopy 107,626–634.
2. Corle, T.R. & Kino, G.S. (1996).Confocal Scanning Optical Microscopy and Related Imaging Systems.San Diego:Academic Press.
3. Zeitler, E. & Thomson, M.G.R. (1970).Scanning transmission electron microscopy.Optik 31,258–280 & 359–366.
4. Van Benthem, K. , Lupini, A.R. , Kim, M. , Baik, H.S. , Doh, S. , Lee, J.-H. , Oxley, M.P. , Findlay, S.D. , Allen, L.J. , Luck, J.T. & Pennycook, S.J. (2005).Three-dimensional imaging of individual hafnium atoms inside a semiconductor device.Appl Phys Lett 87,034104.
5. Borisevich, A.Y. , Lupini, A.R. & Pennycook, S.J. (2006).Depth sectioning with the aberration-corrected scanning transmission electron microscope.Proc Natl Acad Sci 103,3044–3048.
Cited by
51 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献