Author:
Blake D.F.,Allard L.F.,Peacor D.R.,Bigelow W.C.
Abstract
A number of workers have described instrument modifications designed to
reduce systems peaks obtained in an analytical electron microscope during
EDS analyses (1-4). These procedures, while effective, have suffered from
one or all of the following limitations: 1) the physical modifications to
the column limit the versatility of the instrument in other modes of
operation (for example, low magnification scanning may be prohibited); 2)
hole counts invariably comprise a large enough fraction of the sample
spectrum that they must be subtracted from the spectrum prior to
quantitation; and 3) analysis for elements such as Cu or Fe, which are
present in the near specimen environment, is either impaired or precluded.
We have found that the JEOL JEM-100CX can be modified to produce ultra-clean
X-ray spectra that suffer from none of the above limitations.
Publisher
Cambridge University Press (CUP)
Reference4 articles.
1. Bentley, J. et al., SEM/1979/II, p.
581.
2. Nicholson, W.A.P. et al., EMAG 1977, p.
373.
3. Zaluzec, N.J. Intro to AEM, J.J. Hren, et al., ed.,
Ch. 4 (1979).
4. Headley, T.J. and Hren, J.J. Proc 9th Intl. Cong, on
EM, p. 504 (1979).
Cited by
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