Effect of Capping Layer on Hillock Formation in Thin Al Films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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4. Morphological and Structural Characterization of Magnetron-Sputtered Aluminum and Aluminum-Boron Thin Films;Crystals;2021-04-28
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