Affiliation:
1. BOZOK ÜNİVERSİTESİ
2. GAZİ ÜNİVERSİTESİ
3. KARADENIZ TECHNICAL UNIVERSITY
Abstract
In this work, ZnS thin films have been prepared by Radio Frequency (RF) magnetron sputtering on Germanium (Ge) optical windows for anti-reflection coating (ARC). ZnS films were produced at different thicknesses using RF sputtering system working pressures under 3, 20 and 30 mTorr. The other RF systems parameters such as RF power, deposition temperature were kept constant for all depositions. Crystal structures, optical and surface properties of ZnS thin films were characterized with X-ray diffraction (XRD), Atomic force microscopy (AFM), Fourier transform ınfrared (FTIR) and UV-VIS transmission spectrometer. The result of Ge substrates coated ZnS thin films grown at 3 mTorr pressure show that high optical transmission and good crystallinity in ınfrared wavelength region (2-14 m).
Publisher
Omer Halisdemir Universitesi
Reference28 articles.
1. [1] H. A. Macleod, Thin-Film Optical Filters, Fourth ed.: CRC press, London, 2010.
2. [2] C. Claeys and E. Simoen, Germanium-based technologies: from materials to devices: Elsevier, p.17, 2011.
3. [3] I. Chambouleyron and J. Martínez, "Optical Properties of Dielectric and Semiconductor Thin Films," in Handbook of Thin Films, ed: Elsevier, 2002, pp. 593-622.
4. [4] A. Musset and A. Thelen, "IV Multilayer Antireflection Coatings," in Progress in Optics. vol. 8, E. Wolf, Ed., ed: Elsevier, 1970, pp. 201-237.
5. [5] J. A. Dobrowolski, "Optical properties of films and coatings," Handbook of optics, vol. 1, pp. 42.3-42.130, 1995.