LPD 法によるSnO<sub>2</sub> を用いたガラス基板に対する銅めっき皮膜の密着機構-Reference-Cited by-同舟云学术

LPD 法によるSnO<sub>2</sub> を用いたガラス基板に対する銅めっき皮膜の密着機構

Published:2023-09-10 Issue:5 Volume:12 Page:265-270
ISSN:2186-702X
Container-title:Journal of Smart Processing
language:en
Short-container-title:

Author:

TSUKUDA Mayu¹,NAGAO Toshimitsu¹,KATAYAMA Jun-ichi¹,HIROOKA Asuka²,SENOO Shunsaku²,HAYAMIZU Masahito²,SAKATA Toshihiko²

Affiliation:

1. Okuno Chemical Industries Co., Ltd.

2. Panasonic Environmental Systems & Engineering Co., Ltd.

Publisher

Sumart Processing Society for Minerals, Environment and Energy

Subject

Industrial and Manufacturing Engineering,Surfaces, Coatings and Films

Link

https://www.jstage.jst.go.jp/article/jspmee/12/5/12_265/_pdf

Reference15 articles.

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3. 3） S. Otomo, J. Katayama and M. Izaki: “Adhesion Improvement by heat treatment of Cu thin film on Glass Substrates with Intermediate Layer of ZnO by Chemical Deposition”, Proceedings of the Micro- Electronics Symposium, 16 （2006）, 347-350. （in Japanese）

4. 4） S. Otomo: “Fine Pattern on Glass Substrate”, Journal of the Surface Finishing Society of Japan, 58-12 （2007）, 53-57. （in Japanese）

5. 5） S. Deki and M. Mizuhata: “Synthesis of Metal Oxide Films Using Liquid-Phase Deposition Methods”, Electrochemistry, 76-9 （2008）, 678-686. （in Japanese）