Micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect-Reference-Cited by-同舟云学术

Micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect

Published:2016-03 Issue:2 Volume:52 Page:210-215
ISSN:8756-6990
Container-title:Optoelectronics, Instrumentation and Data Processing
language:en
Short-container-title:Optoelectron.Instrument.Proc.

Author:

Busurin V. I.,Pham A. T.

Publisher

Allerton Press

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Link

http://link.springer.com/content/pdf/10.3103/S8756699016020151.pdf

Reference10 articles.

1. J. Fraden, Handbook of Modern Sensors: Physics, Design, and Applications (Springer, New York, 2004; Tekhnosfera, Moscow, 2005).

2. X. Dunzhu, Y. Cheng, and K. Lun, “The Development of Micro-Machined Gyroscope Structure and Circuitry Technology,” Sensors. 14 (1), 1394–1473 (2014).

3. E. G. Kostsov, “State and Prospects of Micro- and Nanoelectromechanics,” Avtometriya 45 (3), 3–52 (2009) [Optoelectron., Instrum. Data Process. 45 (3), 189–226 (2009)].

4. V. Ya. Raspopov, Micromechanical Devices (Mashinostroenie, Moscow, 2007) [in Russian].

5. D. Z. Xia, C. Yu, and Y. L. Wang, “A Digitalized Silicon Micro-Gyroscope Based on Embedded FPGA,” Sensors 12 (10), 13150–13166 (2012).

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rotary angular velocity transducer with optical information sensing;XLIV ACADEMIC SPACE CONFERENCE: dedicated to the memory of academician S.P. Korolev and other outstanding Russian scientists – Pioneers of space exploration;2021

2. Microoptoelectromechanical ring angular velocity transducer based on the optical tunnel effect for control system of mobile objects;Journal of Physics: Conference Series;2019-10-01

3. Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect;Optoelectronics, Instrumentation and Data Processing;2017-11