1. G. Jäger, R. Grünwald, E. Manske, et al., “A Nanopositioning and Nanomeasuring Machine: Operation, Measured Results,” Nanotechnol. Precision Eng. 2(2), 81–84 (2004).
2. H.-J. Büchner, G. Jäger, and E. Manske, “Laserinterferometrically Assisted 3D-Nanometrology on the Atomic Force Microscope Type VERITEKT,” in Proc. of the 1st EUSPEN-Conference, Bremen, Germany, 1999.
3. P. Lehmann, “Measurement of Microgeometry Using White-Light Interferometry and Confocal Microoptical Sensors,” VDI-Berichte, Messtechnik für Mikro- und Nano-Engineering, No. 1950, 119–128 (2006).
4. K. C. Fan, Y. T. Fei, X. F. Yu, et al., “Development of a Low-Cost Micro-CMM for 3D Micro/Nano Measurements,” Meas. Sci. Technol. 17(3), 524–532 (2006).
5. “Documents Concerning the New Definition of the Meter,” Metrologia 19(4), 163–177 (1984).