Investigation of the Si–B–C–N coatings deposited by magnetron sputtering of SiBC targets
Author:
Publisher
Allerton Press
Subject
Metals and Alloys,Surfaces, Coatings and Films,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.3103/S1067821215050077.pdf
Reference25 articles.
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3. Ge, K., Ye, L., Han, W., et al., Si(B)CN-doped carbon nanofibers with excellent oxidation resistance, Mater. Lett., 2013, vol. 112, pp. 124–128.
4. Hegemann, D., Riedel, R., and Oehr, C., PACVDderived thin films in the system Si–B–C–N, Chem. Vap. Deposition, 1999, vol. 5, pp. 61–65.
5. Abu, Samra H., Kumar, A., Xia, J., et al., Development of a new generation of amorphous hard coatings based on the Si–B–C–N–O system for applications in extreme conditions, Surf. Coat. Technol., 2013, vol. 223, pp. 52–67.
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