Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy-Reference-Cited by-同舟云学术

Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy

Published:2011-01 Issue:1 Volume:75 Page:67-72
ISSN:1062-8738
Container-title:Bulletin of the Russian Academy of Sciences: Physics
language:en
Short-container-title:Bull. Russ. Acad. Sci. Phys.

Author:

Barysheva M. M.,Vainer Yu. A.,Gribkov B. A.,Zorina M. V.,Pestov A. E.,Rogachev D. N.,Salashchenko N. N.,Chkhalo N. I.

Publisher

Allerton Press

Subject

General Physics and Astronomy

Link

http://link.springer.com/content/pdf/10.3103/S1062873811010059.pdf

Reference13 articles.

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3. Blunt, R., CEMANTECH Conf., Vancouver, Apr. 24–27, 2006, pp. 59–62.

4. Asadchikov, V.E., Vingradov, A.V., Zryuev, V.N., et al., Zavod. Lab. Diagn. Mater., 2001, vol. 67, no. 12, pp. 19–23.

5. Griffith, J.E. and Grigg, D.A., J. Appl. Phys., 1993, vol. 74, pp. R83–R109.

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