Author:
Agafonov A. N.,Vlasenko M. G.,Volodkin B. O.,Gerasimov V. V.,Kaveev A. K.,Knyazev B. A.,Kropotov G. I.,Pavelyev V. S.,Palchikova I. G.,Soyfer V. A.,Stupak M. F.,Tukmakov K. N.,Tsygankova E. V.,Choporova Yu. Yu.
Subject
General Physics and Astronomy
Reference12 articles.
1. Methods for Computer Design of Diffractive Optical Elements, Soifer, V.A., Ed., John Wiley & Sons, 2002.
2. Knyazev, B.A., Kulipanov, G.N., and Vinokurov, N.A., Measur. Sci. Techn., 2010, vol. 21, p. 054017.
3. www.tydexoptics.com/pdf/Si.pdf
4. Laermer, F., et al., US Patent 5501893, 1996.
5. Wang, S., Xu, J. Yuan, T., et al., J. Vacuum Sci. Techn. B: Microelectron. Nanometer Struct., 2002, vol. 20, p. 2780.
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献