Influence of oxygen dose and heat treatment conditions on the formation of ion synthesized borosilicate layers-Reference-Cited by-同舟云学术

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Influence of oxygen dose and heat treatment conditions on the formation of ion synthesized borosilicate layers

Published:2012-05 Issue:5 Volume:76 Page:588-591
ISSN:1062-8738
Container-title:Bulletin of the Russian Academy of Sciences: Physics
language:en
Short-container-title:Bull. Russ. Acad. Sci. Phys.

Author:

Zorina D. D.,Pron N. P.,Krivelevich S. A.,Bachurin V. I.,Churilov A. B.

Publisher

Allerton Press

Subject

General Physics and Astronomy

Link

http://link.springer.com/content/pdf/10.3103/S1062873812050280.pdf

Reference11 articles.

1. Aristov, V.V., Mordkovich, V.N., and Mal’tsev, P.P., Nano-Mikroskhemn. Tekhn., 2006, no. 12, p. 41.

2. Barabanenkov, M.Yu., Borun, A.F., Danilin, A.B., et al., Nucl. Instrum. Methods Res. B, 1991, vol. 58, p. 179.

3. Barabanenkov, M.Yu., Borun, A.F., Danilin, A.B., et al., Nucl. Instrum. Methods Res. B, 1992, vol. 66, p. 352.

4. Tyschenko, I.E. and Popov, V.P., Fiz. Tekhn. Poluprovodn., 2010, vol. 45, no. 3, p. 335.

5. Kachurin, G.A. and Tyschenko, I.E., Mikroelektron., 1994, vol. 23, no. 6, p. 3.

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