Author:
Filatov A. Yu.,Sidorko V. I.,Filatov Yu. D.
Subject
Inorganic Chemistry,General Materials Science
Reference17 articles.
1. Preston, F.W., The Theory and Design of Plate Glass Polishing Machines, J. Soc. Glass Technol., 1927, vol. 11, pp. 214–256.
2. Komanduri, R., Lucca, D.A., Tani, Y., Technological Advances in Fine Abrasive Processes, Annals of CIRP, 1997, no. 46/2, pp. 545–596.
3. Fahnle, O.W., van Brug, H., Novel Approaches to Generate Aspherical Optical Sufaces, SPIE Conference on Optical Manufacturing and Testing III, Denver, Colorado, USA, 20–23 July 1999, SPIE Proc., vol. 3782, pp. 170–176.
4. Fahnle, O.W., Wons, T., Koch, E., et al., ITIRM as a Tool for Qualifying Polishing Processes, Applied Optics, 2002, vol. 41, no. 19/1, pp. 4036–4038.
5. Ouma, D.O., Boning, D.S., Chung, J.E, et al., Characterization and Modeling of Oxide Chemical-Mechanical Polishing Using Planarization Length and Pattern Density Concepts, IEEE Transactions on Semiconductor Manufacturing, 2002, vol. 15, no. 2, pp. 232–243.
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