The use of scanning probe microscope with a diamond tip as a nanotechnological tool
Author:
Publisher
Allerton Press
Subject
Inorganic Chemistry,General Materials Science
Link
http://link.springer.com/content/pdf/10.3103/S1063457609060069.pdf
Reference17 articles.
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3. Majumdar, A., Oden, P.I., Carrejo, J.P., et al., Nanometer-Scale Lithography Using the Atomic Force Microscope, Appl. Phys. Lett., 1992, vol. 61, no. 19, pp. 2293–2295.
4. Davidsson, P., Lindell, A., Makela, T., et al., Nano-Lithography by Electron Exposure Using an Atomic Force Microscope, Microelectron. Eng., 1999, vol. 45, no. 1, pp. 1–8.
5. Ishibashi, M., Heike, S., Kajiyama, H., et al., Characteristics of Scanning-Probe Lithography with a Current-Controlled Exposure System, Appl. Phys. Lett., 1998, vol. 72, no. 13, pp. 1581–1583.
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