Performance Efficiency of the Polishing of Polymer Optical Materials
Author:
Publisher
Allerton Press
Subject
Inorganic Chemistry,General Materials Science
Link
https://link.springer.com/content/pdf/10.3103/S1063457622050021.pdf
Reference57 articles.
1. Filatov, Y.D., Polishing of precision surfaces of optoelectronic device elements made of glass, sitall, and optical and semiconductor crystals: A review, J. Superhard Mater., 2020, vol. 42, no. 1, pp. 30–48.
2. Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Y.D., and Vetrov, A.G., Material removal rate in polishing anisotropic monocrystalline materials for optoelectronics, J. Superhard Mater., 2016, vol. 38, no. 2, pp. 123–131.
3. Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Y.D., and Vetrov, A.G., Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics, Funct. Mater., 2016, vol. 23, no. 1, pp. 104–110.
4. Filatov, Yu.D., Filatov, A.Yu., Syrota, O.O., Yashchuk, V.P., Monteil, G., Heisel, U., and Storchak, M., The influence of tool wear particles scattering in the contact zone on the workpiece surface microprofile formation in polishing quartz, J. Superhard Mater., 2010, vol. 32, no. 6, pp. 415–422.
5. Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Yu.D., and Vetrov, A.G., Polished surface roughness of optoelectronic components made of monocrystalline materials, J. Superhard Mater., 2016, vol. 38, no. 3, pp. 197–206.
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