Author:
Filatov Yu. D.,Sidorko V. I.,Sokhan’ S. V.,Kovalev S. V.,Boyarintsev A. Y.,Kovalev V. A.,Yurchyshyn O. Y.
Subject
Inorganic Chemistry,General Materials Science
Reference68 articles.
1. Filatov, Y.D., Polishing of precision surfaces of optoelectronic device elements made of glass, sitall, and optical and semiconductor crystals: A review, J. Superhard Mater., 2020., vol. 42, no. 1, pp. 30–48.
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3. Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Y.D., and Vetrov, A.G., Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics, Funct. Mater., 2016, vol. 23, no. 1, pp. 104–110.
4. Filatov, Yu.D., Mechanism of surface microrelief formation during glass treatment, Sverkhtverd. Mater., 1991, vol. 13, no 5, pp. 63–67.
5. Filatov, Yu.D., Sidorko, V.I., Filatov, A.Yu., Yashuk, V.P., Heisel, W., and Storchak, M., Surface quality control in diamond abrasive finishing, Proc. SPIE, 2009, vol. 7389, p. 73892O.
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