Fabrication Process for Low-Tc Superconductor Electronics Devices and Its Future Prospects

Author:

HIDAKA Mutsuo1,NAGASAWA Shuichi1

Affiliation:

1. National Institute of Advanced Industrial Science and Technology

Publisher

Cryogenic Association of Japan

Reference40 articles.

1. 1) H. Greiner, el al.: “Fabrication process for Josephson integrated circuits”, IBM J. Res. Develop. 24 (1980) 195-205

2. 2) M. Gurvitch, et al.: “High quality refractory Josephson junctions using thin aluminum layers”, Appl. Phys. Lett. 42 (1983) 472-474

3. 3) S. Nagasawa, et al.: “A 380ps, 9.5mW Josephson 4-Kbit RAM operated at a high bit yield”, IEEE Trans. Appl. Supercond. 5 (1995) 2447-2452

4. 4) T. Imamura, et al.: “Fabrication of high quality Nb/AlOx-Al/Nb Josephson junctions: I-Sputtered Nb films for junction electrodes”, IEEE Trans. Appl. Supercond. 2 (1992) 1-14

5. 5) N. Takeuchi, et al.: “Adiabatic quantum-flux-parametron cell library designed using a 10 kA/cm2 niobium fabrication process”, Supercond. Sci. Technol. 30 (2017) 035002

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