Ion-Beam-Induced Modifications of Nanocrystalline ZnO Thin Films Grown by Atomic Layer Deposition
-
Published:2023
Issue:03
Volume:30
Page:
-
ISSN:0971-4588
-
Container-title:Indian Journal of Engineering and Materials Sciences
-
language:
-
Short-container-title:IJEMS
Publisher
CSIR-National Institute of Science Communication and Policy Research (NIScPR)
Subject
General Engineering,General Materials Science