Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers

Abstract

This paper presents two fabrication techniques of spiral integrated inductors based on magnetic materials. For the first one, the magnetic core is a thin film deposited by RF magnetron sputtering, for the second technique the magnetic core is a thick layer of YIG obtained by micromachining. The addition of the magnetic material is expected to improve the performances of the integrated structure with electromagnetic shield. Low and high frequency equipment are used to characterize the manufactured components. A good correlation is obtained between the results by simulation and measurements for the two manufacturing techniques. These results show that the inductance increases when the thickness of the magnetic layer increases, we can double the inductance value for a thickness sufficiently high.