High speed, high resolution ultrasonic linear motor using V-shape two bolt-clamped Langevin-type transducers
Author:
Affiliation:
1. Taiheiyo-Cement Corporation
2. Tokyo Institute of Technology
Publisher
Acoustical Society of Japan
Subject
Acoustics and Ultrasonics
Link
http://www.jstage.jst.go.jp/article/ast/30/3/30_3_180/_pdf
Reference11 articles.
1. Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
2. Ultrasonic motors—constructions/characteristics/applications
3. Hybrid Transducer Type Ultrasonic Linear Motor
4. A High Power Ultrasonic Linear Motor Using a Longitudinal and Bending Hybrid Bolt-Clamped Langevin Type Transducer
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