Prediction of Vacuum Pump Degradation in Semiconductor Processing

Author:

Butler Shane W.,Ringwood John V.,MacGearailt Niall

Publisher

Elsevier BV

Subject

General Medicine

Reference8 articles.

1. Forecasting and Time Series: An Applied Approach;Bowerman,1993

2. W. Cheung, J. Lim, K. Chung, and S. Lee. A precision diagnostic method for the failure protection and predictive maintenance of a vacuum pump, June 2006. URL www.wipo.int/pctdb/en/wo.jsp?wo=2006064991l.

3. G. Kacprzynski, M. Gumina, M. Roemer, D. Caguiat, T. Galie, and J. McGroarty. A prognostic modeling approach for predicting recurring maintenance for shipboard propulsion systems. In ASME Turbo Expo, New Orleans, USA, Jun 2001.

4. Diagnostic system to determine the in-service life of dry vacuum pumps;Konishi;IEE Proceedings – Science, Measurement and Technology,1999

5. Data collection and networking capabilities enable pump predictive diagnostics;Mooney;Solid State Technology,2005

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