Cyclic Scheduling of Sequentially Connected Cluster Tools with a Single I/O Module
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference13 articles.
1. Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations;Chan;IEEE Transactions on Automation Science and Engineering,2011
2. Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis;Chan;IEEE Transactions on Automation Science and Engineering,2011
3. Cyclic scheduling of cluster tools with nonidentical chamber access times between parallel chambers;Kim;IEEE Transactions on Semiconductor Manufacturing,2012
4. Scheduling analysis of time-constrained dual-armed cluster tools;Kim;IEEE Transactions on Semiconductor Manufacturing,2003
5. Stable earliest starting schedules for cyclic job shops: A linear system approach;Lee;International Journal of Flexible Manufacturing Systems,2000
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