Modeling, Simulation and Performance Analysis of Multichannel Mems Piezoelectric Cantilevers for Cochlear Implantable Module

Abstract

This work presents the enhanced area-efficient Multi-channel MEMS (Micro-Electrical Mechanical System) piezoelectric cantilever device (PCD) for a fully cochlear implantable sensor that works within the audible frequency range of 300-4800 Hz. The sound pressure level (SPL) of 95 dB, 100 dB, and 110 dB input is given in order to resonates the audible frequency range of the device which is placed on the eardrum. This stimulates the auditory nerve via the cochlea to send information to the brain. As a result, the Multi-channel MEMS piezoelectric cantilever device generates the highest potential voltage of 870 mV at 110-dB SPL and is detected under the excitation of 300 Hz. The output parameters such as von Mises stress, displacement, and the complete frequency bandwidth performance are analyzed using COMSOL Multiphysics.