1. Institute of Microelectronics of the Chinese Academy of Sciences, No. 3 Beitucheng West Rd., Chaoyang District, Beijing 100029, China, https://orcid.org/0009-0003-6299-4450 (Y.L.)
2. Institute of Microelectronics of the Chinese Academy of Sciences, No. 3 Beitucheng West Rd., Chaoyang District, Beijing 100029, China, (Corresponding author), e-mail: wuxiaobin@ime.ac.cn