1. International Chinese-Belorussian Scientific Laboratory on Vacuum-Plasma Technology, Nanjing University of Science and Technology, 200 Xiaolingwei St., Nanjing 210094, China
2. Francisk Skorina Gomel State University, 104 Sovetskaya St., Gomel 246019, Belarus (Corresponding author), e-mail: rogachevav@mail.ru, https://orcid.org/0000-0001-7206-3092
3. Institute of New Carbon Materials, Taiyuan University of Technology, 209 University St., Taiyuan 030024, China
4. Francisk Skorina Gomel State University, 104 Sovetskaya St., Gomel 246019, Belarus