Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality-Reference-Cited by-同舟云学术

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Applications of Sparse Modelling and Principle Component Analysis for the Virtual Metrology of Comprehensive Multi-dimensional Quality

Published:2019 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the 8th International Conference on Operations Research and Enterprise Systems
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Author:

Arima Sumika¹,Nagata Takuya²,Bu Huizhen²,Shimada Satsuki²

Affiliation:

1. Faculty of Engineering, Information, and Systems, University of Tsukuba, Tsukuba, Ibaraki Pref. and Japan, --- Select a Country ---

2. Graduate School of Systems and Information Engineering, University of Tsukuba, Tsukuba, Ibaraki Pref. and Japan, --- Select a Country ---

Publisher

SCITEPRESS - Science and Technology Publications

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dynamic sparse PCA: a dimensional reduction method for sensor data in virtual metrology;Expert Systems with Applications;2024-10

2. True sparse PCA for reducing the number of essential sensors in virtual metrology;International Journal of Production Research;2023-05-28

3. Virtual Metrology of Visualizing Copper Microstructure Featured with Computer Vision and Artificial Neural Network;2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA);2021-09-15

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