A REVIEW ON LASER ASSISTED DEPOSITION AND MICRO-ETCHING OF SILICON CARBIDE (SiC) COATING FOR MEMS DEVICE APPLICATIONS
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Published:2013
Issue:2
Volume:7
Page:7-21
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ISSN:0973-9106
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Container-title:International Journal on Design and Manufacturing Technologies
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language:en
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Short-container-title:Int. Jour. Des. Manf. Tech.
Author:
I.A Palani,C.P Paul
Publisher
Sathyabama University
Subject
Community and Home Care
Cited by
2 articles.
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