Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector-Reference-Cited by-同舟云学术

Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector

Published:2021-03-20 Issue:5 Volume:29 Page:753-758
ISSN:0928-0219
Container-title:Journal of Inverse and Ill-posed Problems
language:en
Short-container-title:

Author:

Borzunov Andrey A.¹^ORCID,Lukyanenko Dmitry V.²^ORCID,Rau Eduard I.³^ORCID,Yagola Anatoly G.¹^ORCID

Affiliation:

1. Department of Mathematics , Faculty of Physics , Lomonosov Moscow State University , 119991 Moscow , Russia

2. Department of Mathematics , Faculty of Physics , Lomonosov Moscow State University , 119991; and Moscow Center for Fundamental and Applied Mathematics, 119234 Moscow , Russia

3. Department of Physical Electronics , Faculty of Physics , Lomonosov Moscow State University , 119991 Moscow , Russia

Abstract

Abstract A new technique for three-dimensional surface reconstruction of relatively smooth surface topography using the scanning electron microscopy with backscattered electron detector is considered. Experiments show high effectiveness of the method.

Publisher

Walter de Gruyter GmbH

Subject

Applied Mathematics

Link

https://www.degruyter.com/document/doi/10.1515/jiip-2020-0136/pdf

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