Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range-Reference-Cited by-同舟云学术

Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

Published:2021-11-01 Issue:2 Volume:8 Page:81-85
ISSN:2329-8774
Container-title:Energy Harvesting and Systems
language:en
Short-container-title:

Author:

Ansari Hamid Reza¹,Kordrostami Zoheir¹

Affiliation:

1. Department of Electrical and Electronics Engineering , Shiraz University of Technology , Shiraz , Iran

Abstract

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

Publisher

Walter de Gruyter GmbH

Subject

Electrochemistry,Electrical and Electronic Engineering,Energy Engineering and Power Technology,Renewable Energy, Sustainability and the Environment

Link

https://www.degruyter.com/document/doi/10.1515/ehs-2021-0017/pdf

Reference15 articles.

1. Ansari, H. R., and M. B. Taghaddosi. 2020. “Optimization and Development of the RF MEMS Structures for Low Voltage, High Isolation and Low Stress.” Analog Integrated Circuits and Signal Processing 101: 659–68.

2. Ansari, H. R., and Z. Kordrostami. 2020. “Development of a Low Stress RF MEMS Double-Cantilever Shunt Capacitive Switch.” Microsystem Technologies 26: 2739–48.

3. Amiri, P., and Z. Kordrostami. 2018. “Sensitivity Enhancement of MEMS Diaphragm Hydrophones Using an Integrated Ring MOSFET Transducer.” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 65: 2121–30.

4. Ansari, H. R., and S. Khosroabadi. 2018. “Low Actuation Voltage RF MEMS Shunt Capacitive Switch with High Capacitive Ratio.” In Iranian Conference on Electrical Engineering (ICEE).

5. Ansari, H. R., Z. Kordrostami, and S. Hamedi. 2020. “Effect of Passive Elements on the Isolation of a Pin-Pin RF MEMS Switch in an Electrical Circuit.” In Iranian Conference on Electrical Engineering (ICEE).

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